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Description: nanonic GmbH - Electron Beam Lithography with your SEM
sem (2120) rem (72) fib (41) ebl (20) electron beam lithography (5) e-beam lithography (5) focused ion beam (3) nano lithography (2) nano patterning (2) fib patterning (2)
nanonic GmbH is a professional and reliable partner for modern and user-friendly nanolithography solutions. We offer customized state-of-the art facilities and services in the range of R&D oriented electron beam- and FIB-lithography . Rely on forward-looking technologies in combination with intuitive software ergonomics and profit from the advantage of our staff's immediate competence.
This marvelous honeycomb pattern was created by employing our eLitho EK 03 w ith a field emission electron microscope. The width of the PMMA lines is clearly below 10 nm.
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