Description: IDI Pump Pressure on Demand Dispense Unit, IDI M300, IDI M450, IDI M550, intergrated designs,
Example domain paragraphs
IDI M300 / IDI M310 Pressure on Demand Dispense Unit 0-300 cp used for photo-resist, solvent, and developer. Integrated source switching, up to three outputs with constant flow rate.
The IDI-M450 pumps flexibility allows use with other photo chemicals up to 100 cP in viscosity. Integrated support for Now Technologies PNP Smart Probe™ meets the process protection required in many of today’s fabs. The host tool interface selection is user selectable using the ChemNet software.
The IDI-M550 pumps flexibility allows use with other photo chemicals up to 100 cP in viscosity. Integrated support for Now Technologies PNP Smart Probe™ meets the process protection required in many of today’s fabs. The host tool interface selection is user selectable using the ChemNet software.
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